ORGANIC EL COATING APPARATUS AND METHOD

摘要

PROBLEM TO BE SOLVED: To well coat a substrate with a coating solution by always continuously discharging the coating solution in a liquid column state regardless of a coating condition. SOLUTION: A nozzle 4a is equipped with a nozzle main body 41 of which the leading end is opened. A spacer 42, a filter 43, a spacer 44 and a leading end member 45 are inserted in the internal space SP of the nozzle main body 41 in this order and held in an internal space SP by externally mounting a fixing cap 46 to the leading end part of the nozzle main body 41. When the fixing cap 46 is detached from the leading end part of the nozzle main body 41, the leading end member 45 is detached from the nozzle main body 41, and further the spacer 44 and the filter 43 are taken out from the internal space SP of the nozzle main body 41. An orifice 45a is bored in the almost central part of the leading end member 45 as a nozzle orifice. COPYRIGHT: (C)2004,JPO