COATING METHOD OF SUBSTRATE WITH TREATMENT LIQUID AND COATING APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a coating method with a treatment liquid capable of improving the production efficiency by reducing the effect on a feed speed by the coating with the treatment liquid while preventing the scattering of the treatment liquid such as a developer or the like.

SOLUTION: A plurality of coating rollers 10 and 10 arranged in series in one direction are rotated so as not to generate a sliding at a contact position of the respective rollers 10 and a base 5 while moving the base 5 in the one direction in the contact state of the respective rollers 10 with the base 5. Thereby, the base 5 is coated with a predetermined treatment liquid contained in the respective rollers 10 so that the coating range of the respective rollers 10 on the base 5 continues in the one direction.

COPYRIGHT: (C)2004,JPO