| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding device of a plate-like member which supports the member such as, a glass substrate or the like for a semiconductor wafer or a liquid crystal without bringing into contact with its lower surface and which can surely clamp its peripheral edges. SOLUTION: The holding device of the plate-like member includes a rotatably driven rotor 7, a plurality of tilting edges 20 having bearing surfaces 21 provided with a predetermined interval in a circumferential direction of the rotor, tilting toward a radial direction of the rotor and supporting the peripheries of the lower surfaces of the semiconductor wafers U, clamp pins 19 respectively provided near the plurality of the tilting edges, and a drive mechanism 81 for moving the pins in the radial inward of the rotor along the tilting bearing surfaces to hold the edges of the wafers U supported to the edges. COPYRIGHT: (C)2004,JPO |
