| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming device for forming a thin film on the substrate of a large area like an organic EL element, the substrate of 20 inches for instance, while maintaining the excellent intra-plane uniformity of film quality and film thickness. SOLUTION: This film forming device 30 is the film forming device of an organic thin film for forming the organic EL element, and is provided with the same constitution as a conventional film forming device except for the constitution of an injector. The injector 32 is constituted of a planar member 34 connected to a raw material gas supply tube 22 and a block-like member 36 connected to the planar member 34. The injector is constituted as the 8-stage cascade branching structure of 1st to 8th branching tubes formed at the planar member 34 and the block-like member 36. COPYRIGHT: (C)2004,JPO
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