发明名称 OPTICAL COMPONENT MOUNTING DEVICE, METHOD THEREFOR AND ALIGNER
摘要 PROBLEM TO BE SOLVED: To automatically mount a hologram mask to a prism. SOLUTION: This optical component mounting device comprises filling liquid supply devices 234, 236 and 238 for supplying a filling liquid 204 onto each one side of the mounting surfaces of optical components 200, 202; conveying devices 231, 232 which convey anyone among a plurality of optical components, make their mounting surfaces 203 confront each other, and compress them; an inspecting light emitting device 260 for emitting inspection light 266 almost vertically to the mounting surface 203 of the optical component 202; a detecting position changing device 262 for conveying the inspecting light emitting device which emits inspecting light to a plurality of the inspecting positions on the mounting surface; distance measuring devices 240, 264 for measuring the distance to the mounting surface of another optical component 200 about each detecting position based on a reflection light of the inspecting light; and a control device 264 for compensating the conveyance distance by conveying devices 231, 232 so that the distances are set to be equal, if the distances of another optical component to the mounting surface measured by the distance measuring device are different depending on the detecting positions. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004079788(A) 申请公布日期 2004.03.11
申请号 JP20020238150 申请日期 2002.08.19
申请人 SEIKO EPSON CORP 发明人 IRIGUCHI CHIHARU
分类号 G03F7/20;G03H1/22;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/20
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