| 摘要 |
PROBLEM TO BE SOLVED: To eliminate irregularity of temperature of a wafer retainer and obtain necessary temperature uniformity and temperature responsivity by installing a contact member which retains a peripheral part of a planar ceramic member and is connected with the metal case. SOLUTION: In the wafer retainer, a resistance heater is arranged on one main surface of the planar ceramic member, and a mounting surface for mounting a wafer is arranged on the other main surface. The wafer retainer is provided with a power supply part for supplying a power to the resistance heater, the metal case for surrounding the power supply part, and a nozzle which is arranged on the metal case and cools the planar ceramic member. Heat content of the metal case is made 0.5-3.0 times that of the planar ceramic member, so that the superior wafer retainer can be obtained wherein difference between temperatures in a wafer surface is small and cooling time is short. COPYRIGHT: (C)2004,JPO
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