| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasound image inspection method and apparatus, in which a sample disposed in a water tank is not brought into contact with a medium such as water and so forth, in which all samples can be inspected when the samples are electronic components and so forth, and in which a defect can be inspected at highly fine accuracy. SOLUTION: The method is applied to the ultrasound image inspection apparatus, which transforms an electric signal synthesized at a flaw detector circuit 22 into an ultrasonic wave at an ultrasonic probe 13 to irradiate the sample 20 through the medium and which visualizes the inside of the sample by transforming the ultrasonic wave returned from the sample into an electric signal at the ultrasonic probe. In the method, the sample 20 is accommodated inside a sample holding tool case 19 at a negative pressure. The sample holding tool case is put into the medium. The electric signal supplied to the ultrasonic probe is a burst wave-like voltage signal having a single frequency. The sample in the sample holding tool case is irradiated with a burst wave-like ultrasonic wave based on the burst wave-like voltage signal through an elastic film 34. COPYRIGHT: (C)2004,JPO
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