| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle diameter distribution measuring apparatus capable of accurately performing a desired measurement, by certainly monitoring existence of degradation of a sample cell such as functional degradation of anti-reflection coating in the sample cell or dirt of the sample cell. SOLUTION: In the particle diameter distribution measuring apparatus, the sample cell 6 is disposed obliquely to an optical axis 4a of light 4 emitted from a light source 1, and the anti-reflection coatings 8a and 8b are formed on an incidence plane 6a and/or outgoing plane 6b of the sample cell 6. Intensity of reflected lights 14a and 14b in the sample cell 6 is monitored, and the existence of the degradation of the sample cell 6 is determined based on the monitoring result. COPYRIGHT: (C)2004,JPO
|
