| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve throughput of the whole device and to manage unitarily various data, by providing a network for performing communication with a storage device and management. <P>SOLUTION: This equipment has a constitution wherein communication for control command, etc., is separated from a network 50 for communicating large volumes of information such as semiconductor manufacturing information, or connecting a storage device 40. That is, the equipment is provided with the network for communication of large volumes and connection of the storage device for storing data. Further, a processing result of at least a required portion out of a calculation part, a control unit and a drawing part is stored and referred. That is, the equipment is provided with an interface to the network for connecting the storage device to at least one of the calculation part, the control unit and the drawing part. <P>COPYRIGHT: (C)2004,JPO |
