LENS PERFORMANCE EVALUATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a lens performance evaluating device capable of appropriately performing performance evaluation such as quality determination of a lens according to an actual service condition. SOLUTION: The lens performance evaluating device 11 comprises a Mach Zehnder interferometer 14 for dividing outgoing light from a light source 13 into object light and reference light, and synthesizing the object light having phase difference by a subject lens 12 and reference light to generate an interference pattern. The evaluating device 11 comprises a computer 17 for determining a wave aberration based on an output of an image pickup element 15 depending on the imaged on a light receiving surface by an imaging lens 16 and calculating various evaluation values of the subject lens based on the wave aberration. In calculating an RMS value based on the wave aberration, the computer 17 performs weighting corresponding to intensity distribution of incidence light in an actual service state of the subject lens. The performance evaluation such as the quality determination of the subject lens according to the actual service condition is allowed thanks to the weighted and calculated RMS value. COPYRIGHT: (C)2004,JPO