| 摘要 |
PROBLEM TO BE SOLVED: To obtain an optimal configuration determining device for an aperture, which can determine the really optimal configuration of the aperture. SOLUTION: The optimal configuration determining device for an aperture is provided with an average value operating means (ST171), a coefficient of variation operating means (ST171) and an optimal configuration deciding means (ST171). The average value operating means (ST171) operates the average value of irradiation strengths on lattice points with respect to the configurations of respective apertures in accordance with the irradiation strength of light on a plurality of lattice points obtained by optical simulation. The coefficient of variation operating means (ST171) operates the total sum of coefficients of variation of the irradiation strengths with respect to the configurations of respective apertures in accordance with the average value of irradiation strengths on the lattice points. The optimal configuration deciding means (ST171) decides the configuration of the aperture having the total sum of coefficients of variation of the biggest irradiation strengths as the most optimal configuration. COPYRIGHT: (C)2004,JPO
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