| 摘要 |
PROBLEM TO BE SOLVED: To provide a diamond film ultraviolet sensor for accurately correcting sensor output and stably detecting and measuring light in the ultraviolet region over a long period. SOLUTION: A polycrystal diamond layer 2 is formed on a substrate 1. A first electrode 3 and a second electrode 4 for impressing an external electric field and a third electrode 5 for trapping carriers are formed on the polycrystal diamond layer 2. A voltage is impressed between the first electrode 3 and the second electrode 4, an external electric field is impressed on the polycrystal diamond layer 2 as an ultraviolet detecting layer, and an intermediate potential between the first electrode 3 and the second electrode 4 such as a ground potential is provided for the third electrode 5. Since the third electrode 5 traps carriers by this, it is possible to prevent the carriers from being trapped in trap levels present in grain boundaries. Therefore, it is possible to prevent output instability such as sensor output response delay caused by the carriers trapped in the trap levels. COPYRIGHT: (C)2004,JPO
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