THREE-DIMENSIONAL SHAPE MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To highly accurately adjust the temperature of only necessary portions of a measuring instrument even if it is an upsized one, without preparing a large-scaled temperature conditioning device. SOLUTION: This three-dimensional measuring instrument mounted with a non-contact or contact type probe has the function of partially adjusting the temperature of only the interior of a reference mirror box of a laser end-measuring machine for measuring the position of a probe axis and necessary portions of a work stocker. An air duct for partial air adjustment has a double structure so as not to mix in external air. COPYRIGHT: (C)2004,JPO