| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro movable device comprising a second flexure and a center electrode range supported by the flexure in part of a movable electrode plate. SOLUTION: This micro movable device comprises a fixed electrode substrate 8, and a movable electrode plate 2 coupled to a support frame 10 through the flexures 21 and held for keeping a prescribed interval to the fixed electrode substrate 8, so that voltage is applied between the fixed electrode substrate 8 and the movable electrode plate 2 for driving the movable electrode plate 2. The flexures 21 are coupled to both the movable electrode plate 2 and an anchor parts 11. On the fixed electrode substrate 8, protrusions 801 are formed to face next-to-flexure electrode ranges 20' of the movable electrode plate 2. Spring performance is provided to the movable electrode plate 2 to elastically deform, so that the movable electrode plate 2 acts as the center electrode range 20 and a second flexure 22. A spring constant k<SB>2</SB>of the movable electrode plate 2 is set to be higher than a spring constant k<SB>1</SB>of the flexures 21. COPYRIGHT: (C)2004,JPO
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