| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing table wherein the polishing object surface of a workpiece is extremely flatly polished, warp and strain are hardly produced even if enlarging its diameter, so that the table is thinned and reduced in weight. SOLUTION: This polishing table comprising a negative electrode of a polishing device and electropolishing the polishing object surface of the workpiece disposed opposed to its surface via electrolyte is formed of conductive ceramic. COPYRIGHT: (C)2004,JPO
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