发明名称 |
Vacuum pump |
摘要 |
A vacuum pump has a housing and a pump mechanism accommodated in the housing. An exhaust-passage forming portion is located outside of the housing. The exhaust-passage forming portion forms an exhaust passage, which exhaust passage guides gas discharged from the pump mechanism toward the outside of the vacuum pump. A thermal conductor is connected to the outer surface of the exhaust-passage forming portion. The thermal conductor is made of a material having a thermal conductance of which is greater than that of the material for the exhaust-passage forming portion.
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申请公布号 |
US2004047755(A1) |
申请公布日期 |
2004.03.11 |
申请号 |
US20030658155 |
申请日期 |
2003.09.08 |
申请人 |
KURAMOTO SATORU;KAWAGUCHI MASAHIRO;YAMAMOTO SHINYA;SATO DAISUKE;UCHIYAMA OSAMU |
发明人 |
KURAMOTO SATORU;KAWAGUCHI MASAHIRO;YAMAMOTO SHINYA;SATO DAISUKE;UCHIYAMA OSAMU |
分类号 |
F04B39/00;F01C21/04;F01C21/06;F01C21/10;F03C4/00;F04B37/14;F04B37/18;F04B39/06;F04B39/12;F04C18/08;F04C18/12;F04C23/00;F04C25/00;F04C25/02;F04C28/28;F04C29/00;F04C29/04;F04C29/12;F04D19/04;H01L21/02;(IPC1-7):F03C4/00 |
主分类号 |
F04B39/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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