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发明名称
SUBSTRATE PROCESSING SYSTEM
摘要
申请公布号
AU2003265634(A1)
申请公布日期
2004.03.11
申请号
AU20030265634
申请日期
2003.08.22
申请人
INTEGRATED DYNAMICS ENGINEERING, INC.
发明人
PRESTON WHITCOMB;JOHN JAMIESON
分类号
B23Q7/04;B65G49/07;H01L21/02;H01L21/677;H01L21/683;(IPC1-7):H01L21/00
主分类号
B23Q7/04
代理机构
代理人
主权项
地址
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