| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for measuring grid distortions and stresses using a convergent beam electron diffraction method, which improves accuracy for extracting segments of HOLZ lines affecting the detection accuracy of the grid distortions, thereby accurately and rapidly quantifying minute grid distortions in a local area of a crystal material. <P>SOLUTION: In the method for measuring the grid distortion which quantifies the grid distortion of the crystal material in a position corresponding to the HOLZ line in a HOLZ figure obtained by making focused electrons 1 enter the crystal material 2 that is an object to be measured, the HOLZ figure is converted into a Haugh transformed figure by applying the Haugh transformation on coordinates of a plurality of points extracted from the HOLZ figure, and multi-lapping points in a plurality of Haugh transformed figures are extracted, and then the HOLZ line of the HOLZ figure is specified by performing an inverse transformation method for the multi-lapping points. Next, the lattice constant of the crystal material is quantified in accordance with the specified position of the HOLZ line, and thereby improving the specifying accuracy of the HOLZ line because the HOLZ line can be specified in a prescribed calculation process without performing such a process that a measurement operator specifies the HOLZ line arbitrarily. <P>COPYRIGHT: (C)2004,JPO |
