| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method that automatically classifies images of defects occurring in surfaces of a semiconductor electronic circuit substrate or the like, does not need to collect much teaching data, can flexibly respond to different defect classifying requests depending on users, and has high reliability, and to provide its device. <P>SOLUTION: A user defines classification class constitution by arbitrarily combining a class provided by a system or a class defined by the user. Additionally, the user provides prior knowledge about a defect class as a constraint, and learning with the constraint is performed. <P>COPYRIGHT: (C)2004,JPO |
