| 摘要 |
<P>PROBLEM TO BE SOLVED: To stably measure the amplitude at the tip of a bonding tool during bonding operation with an ultrasonic wave horn, even if an ultrasonic wave vibration is applied in the direction vertical to a bonding surface. <P>SOLUTION: An ultrasonic wave vibrator system 26 press contacts a tip to an electronic component 4 for pressurizing, and generates ultrasonic wave vibration in the pressurizing direction. A through hole 16 is formed on the ultrasonic wave vibrator system 26 from its base end toward tip side. A laser vibration meter 17A radiates laser beam to the tip through the through hole 16 to observe a reflected light and measures the amplitude at the tip end of the ultrasonic wave vibrator system 26. <P>COPYRIGHT: (C)2004,JPO |
