| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying and dust removing apparatus preventing recontamination of a substrate caused by insufficient blowing. SOLUTION: The conveying and dust removing apparatus jets washing air to a substrate G conveyed from the upstream side to the downstream side by a conveying roller 10 and removes dust therefrom. In the apparatus, the washing air jetted from a jet slit 24 of an air jet chamber 22 flows to the upstream side along the substrate G. When the substrate G is below a suction slit 23, the amount of air jet of the washing air is decreased according to the decrease of the amount of air suction. When the article from which dust is removed is not below the suction slit 23, the amount of air jet of the washing air is increased according to the increase of the amount of air suction. COPYRIGHT: (C)2004,JPO
|
