发明名称 Method of forming flash memories with high coupling ratio and the structure of the same
摘要 The flash memory structure includes a substrate having trenches formed therein, a first dielectric layer and a first conductive layer are stacked on the substrate. Isolations are formed in the trenches and protruding over the surface of the substrate, wherein the first conductive layer is also protruded over the isolations. A second conductive layer is lying the surface of the first conductive layer and a second dielectric layer formed thereon. A third conductive layer is formed on the second dielectric layer. The floating gate is consisted of first conductive layer and the second conductive layer.
申请公布号 US2004048482(A1) 申请公布日期 2004.03.11
申请号 US20030622863 申请日期 2003.07.18
申请人 TSENG HOMG-HUEI 发明人 TSENG HOMG-HUEI
分类号 H01L21/28;H01L21/8247;H01L27/115;H01L29/423;(IPC1-7):H01L21/302;H01L21/461 主分类号 H01L21/28
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