发明名称 Abrasive cloth dresser and method for dressing an abrasive cloth with the same
摘要 An abrasive cloth dresser is provided which is capable of adjusting the state of its dressing face so as to give an abrasive cloth a uniform polishing surface, and capable of giving the surfaces of an abrasive cloth a suitable polishing capability according to polishing objects, even if the dressing face state exhibits individual differences in, for example, the end shapes of abrasive grains. The abrasive cloth dresser 1 includes a base metal 2 having a ring-shaped dressing face 4 in the outer region of the base metal 2. First abrasive grain units 5 and second abrasive grain units 6 formed of abrasive grains with different grain sizes from each other are alternately arranged on the dressing face 4. The base metal 2 includes adjusters 7 for arbitrarily adjusting the height difference delta between reference planes S1 and S2 of the respective abrasive grain units 5 and 6. The reference planes S1 and S2 each include the ends of the abrasive grains with the largest grain size.
申请公布号 US2004048557(A1) 申请公布日期 2004.03.11
申请号 US20030656212 申请日期 2003.09.08
申请人 READ CO., LTD. 发明人 NABEYA TADAKATSU
分类号 B24B53/12;B24B37/00;B24B37/04;B24B53/017;B24B53/02;B24D3/10;B24D7/06;B24D13/14;H01L21/304;(IPC1-7):B24B53/00 主分类号 B24B53/12
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