| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve positioning precision more than the conventional method by performing calculation from design data of a chip. <P>SOLUTION: The locating method of an object having recursive structure obtaining offset of position of a wafer, searches a recursive part from an image, and determines to which recursive part of a chip it corresponds from arrangement of the recursive part. From the chip in the image, a direction where a reference position of the chip is determined, and coordinates of the reference position of a chip is obtained. Based on an angle of a wafer relative to the horizontal direction, the wafer is rotated and set horizontally. <P>COPYRIGHT: (C)2004,JPO |
