| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical scanner and a laser beam machine for positioning a mirror at a high speed with high accuracy. <P>SOLUTION: A bar-shaped drive force transmitting member 8 and a piezoelectric element 5 with one end in the axial direction of the drive force transmitting member 8 fixed thereto to move the drive force transmitting member 8 are provided, a mirror 1 is rotatably supported around the axis of rotation, and the other end of the drive force transmitting member 8 is fixed to the position deviated from the axis of rotation of the mirror 1. When the piezoelectric element 5 is expanded/contracted, the drive force transmitting member 8 rotates the mirror 1 around the axis of rotation while the member is deflected. Thus, the drive force to rotate the mirror 1 can be considerably reduced compared with a case in which the mirror 1 is urged in a contracting direction of the piezoelectric element 5 by a spring or the like. <P>COPYRIGHT: (C)2004,JPO</p> |
