摘要 |
PROBLEM TO BE SOLVED: To stably maintain an optical axis for a light beam that passes through an existing optical path. SOLUTION: Polarization beam splitters 81X and 83X are set on a reference optical path S from an incidence point Qin toward an outgoing point Qout, and polarizing beams that transmit the beam splitters 81X and 83X are made incident from the incidence point Qin. Position information (position of irradiation point Q10 on photodetector 85) of little light for detection reflected by a light distributing surfaceξ2x and orientation information (position of condensing point Q20 on photodetector 87) are stored in a storage device 91 as reference information. The polarization surface of incident light is turned by 90°, light beams are detoured to an optical path D1, a corner reflector 82 is used to lead the light beams from an optical path D3 to the optical dividing surfaceξ2x, and the light beams are reflected to the outgoing point Qout. In such a case, pieces of position and orientation information of little light for detection that transmits the optical dividing surfaceξ2x are detected to control the angle of an optical element 81X and the position of an optical element 82 so as to make the pieces of the position and orientation information close to the reference information in the storage device 91. COPYRIGHT: (C)2004,JPO
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