OPTICAL BEAM SCANNING EXPOSURE DEVICE AND METHOD FOR REGULATING OPTICAL AXIS THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an optical beam scanning exposure device which can regulate optical axes in a simple manner while suppressing upsizing of the device. SOLUTION: The optical beam scanning exposure device is provided with a plurality of optical parts PE including laser light sources, lenses for condensing the exit light of the laser light sources to a photosensitive material to be exposed and mirrors and scans the light beams in a horizontal scanning direction. A supporting member SE for supporting the optical parts PE is provided with a thermal deformation member 54 for changing the positions or postures of the optical parts PE by thermal expansion and is provided with a temperature regulating means TC for regulating the temperature of the member 54. Also, the optical axes of the light beams are regulated by utilizing the thermal expansion of the thermal deformation member at the time of initial regulation before the start of the device operation as a method of regulating the optical axes of the optical beam scanning exposure device. COPYRIGHT: (C)2004,JPO