| 摘要 |
PURPOSE: A manufacturing method of organic electroluminescent display device is provided to form uniformly thickness of an organic electroluminescent material layer by improving directional characteristics of deposition beams. CONSTITUTION: A vapor-depositing mask is disposed adjacent a surface of a substrate disposed in a vacuum chamber. Vapor-depositing beams containing an organic EL material are generated by a vapor-depositing beam generator(50). The vapor-depositing beams pass through openings in the vapor-depositing mask. The organic EL material is vapor-deposited in a predetermined region on the surface of the substrate. The vapor-depositing beams are guided through a plurality of vapor-depositing beam passing pipes(52) provided in the vapor-depositing beam generator. Alternatively, the vapor-depositing beams generated by the vapor-depositing beam generator are guided through a vapor-depositing beam direction adjusting board having a plurality of vapor-depositing beam passing holes.
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