SUBSTRATE TRANSFER ROBOT SYSTEM AND SUBSTRATE TRANSFER VESSEL USED FOR THE SUBSTRATE TRANSFER ROBOT SYSTEM

摘要

PROBLEM TO BE SOLVED: To reduce the adjusting labor and the adjusting cost during assembling/maintenance by providing a deviation detecting mechanism of a substrate transfer vessel in place of a mechanical position adjusting mechanism of the substrate transfer vessel and simplifying the structure of a substrate transfer robot system.

SOLUTION: A pair of detection plates 5 and 6 are provided on the upper face of a cassette 4 performing multistage storing of a substrate 7 mounted on a cassette stage 2. Optical sensors 9 and 10 for detecting the detection plates 5 and 6 are provided on a holder 31c of a substrate transfer robot 3 taking in and out the substrate 7 from the cassette 4 respectively. When the cassette 4 is mounted on the cassette stage 2, the substrate transfer robot 3 is moved to the side of the cassette 4 to detect the edges Ey and Ex of the detection plates 5 and 6 with the optical sensors 9 and 10. The amounts of the deviation of X, Y andθdirections from a reference position are calculated in the cassette stage 2 of the cassette 4 with the detection signals.

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