| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element in which a shorting bar can be drawn around even when the degrees of freedom in layout are small in the acoustic wave element in which a surface acoustic wave resonator is connected in a ladder form. SOLUTION: The surface acoustic wave element includes the surface acoustic wave resonator having a driving electrode and a reflecting electrode and connected in the ladder type and individually cut out from a plurality of surface acoustic wave elements formed on a piezoelectric wafer by wafer processing. In the element, a dicing pattern indicating a boundary for individually separating the plurality of the surface acoustic wave elements by dicing is formed by the wafer processing, the shorting bar for connecting a comb-shaped electrode for constituting the driving electrode through the driving electrode and the reflecting electrode of the element surrounded by the dicing pattern to the dicing pattern is formed, and individually cut out along the dicing pattern. COPYRIGHT: (C)2004,JPO
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