| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic vibrator which is stably used for a long time. SOLUTION: The ultrasonic vibrator is configured by laminating a piezoelectric vibrator layer on a sound absorbent base. Then, the ultrasonic vibrator is formed from a high rigidity layer provided on the side of the piezoelectric vibrator layer and composed of powder of ceramics of at least one kind selected out of the group of a metal oxide, a metal carbide and a metal nitride, and a resin material and a high sound absorption layer provided on the opposite side of the piezoelectric vibrator layer and indicating sound absorption features higher than the high rigidity layer. Further, the piezoelectric vibrator layer and the high rigidity layer are simultaneously cut approximately to the base of the high rigidity layer by a cutter to form grooves, and the piezoelectric vibrator layer is divided into two or more layers. COPYRIGHT: (C)2004,JPO
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