| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an acoustooptical device which enhances beam intensity of primary diffraction light, is small-sized and has vibration resistance. <P>SOLUTION: The acoustooptical device 10, for example, is used for modulation of a laser beam and a first window 14 is disposed on a casing 12 so as to let a laser beam from the outside incident on the center of the acoustooptical element 18 disposed in a casing 12 at a prescribed incident angle. Further, a second window 16 which guides the primary diffraction light 24 emitting from the acoustooptical element 18 is disposed and an optical sensor 30 which receives zero-order diffraction light 26 transmitting the acoustooptical element 18 is disposed. Since the zero-order diffraction light 26 is monitored, the beam intensity of the primary diffraction light 24 is enhanced. Furthermore, by integrating the casing 12 with the optical sensor 30 monitoring the zero-order diffraction light, the miniaturization and vibration resistance of the acoustooptical device 10 is enhanced. <P>COPYRIGHT: (C)2004,JPO</p> |
