| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor easy to manufacture. <P>SOLUTION: This angular velocity sensor is provided with at least a base part 1 provided on an X-Y plane; a first turning fork part 25 extending in an anti-Y-axis direction from the base part 1; a second tuning fork part 26 extending in the Y-axis direction from the base part 1; a first flexural vibrating part 28 provided at the base part 1 to extend in the anti-Y-axis direction further from the first tuning fork part 25 while being between a pair of tuning fork pieces 2a, 2b; a second flexural vibrating part 29 provided at the base part 1 to extend in the Y-axis direction further from the second tuning fork part 26 while being between a pair of tuning fork parts 3a, 3b; driving means 12a, 13b; and detecting means 16a, 17a. The tip parts of the first and second flexural vibrating parts 28, 29 projecting from the tips of the first and second tuning fork parts 25, 26 are provided with added mass parts 30 extending in the X-axis direction and anti-X-axis direction. <P>COPYRIGHT: (C)2004,JPO |
