| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a captured reaction product from falling onto an object to be treated. <P>SOLUTION: While a bell jar 2 is made to have a double-wall structure consisting of an outwall 2a and an inwall 2b, an opening 3 whose aspect ratio is not more than 1 is formed in the side face of the inwall 2b, and a cooling device 4 is arranged on the outside of the outwall 2a to cool the side face of the outwall 2a. <P>COPYRIGHT: (C)2004,JPO |
