| 摘要 |
PROBLEM TO BE SOLVED: To provide an interlayer insulating porous silica zeolite thin film having high mechanical strength by enhancing breakdown voltage at a stable low dielectric constant. SOLUTION: In an interlayer insulating manufacturing application composition, a molar ratio of silica zeolite particles obtained to polycodensate four-functional alkoxysilane expressed in Si(OR<SP>2</SP>)<SB>4</SB>under presence of an organic amine and a silica precursor obtaining an alkoxylane having at least one univalent organic group as a main raw material is controlled in a specific range. A metal impurity in the composition containing an organic solvent is controlled in a specific range or less. In the porous silica zeolite thin film, a degree of silica crystallinity is in a specific range, and the content of the univalent organic group to an Si element in the film is in a specific range. COPYRIGHT: (C)2004,JPO
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