METHOD FOR RECYCLING SILICON FOCUS RING

摘要

PROBLEM TO BE SOLVED: To provide a method for recycling a focus ring used for a plasma etching system for manufacturing a semiconductor. SOLUTION: The method for recycling the silicon focus ring comprises the steps of assembling a first ring (4) obtained by machining a used focus ring and a second ring (7), and composing a combined silicon focus ring (9) having a shape compatiblity with a silicon focus ring used before. COPYRIGHT: (C)2004,JPO