| 摘要 |
PROBLEM TO BE SOLVED: To provide a waveguide type end face light-sensitive element in which capacitance is low, contact resistance with an electrode is small and besides a leak current can be prevented from arising. SOLUTION: There is provided the waveguide type end face light-sensitive element in which an n-side electrode 29 is formed in the whole of an n-type substrate backside and a nonreflecting film 13 is provided in a light-incident end portion. In the element, a contact portion 110 is made as is conventionally done in size (a length L<SB>0</SB>, a width W<SB>0</SB>) and besides a mesa stripe portion 11 is made larger than a conventional structure in size (a length L<SB>1</SB>, a width W<SB>1</SB>), while a p-side electrode 28 is formed only in part of an SiN film 30 located in an upper portion of a contact layer 27 and only in the contact portion 110. COPYRIGHT: (C)2004,JPO
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