| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam device capable of arranging an electron beam path on the same axis as an electron beam. SOLUTION: A first electron beam sensor 70 detecting the center of a mounting board 61 by directly detecting the electron beam from an electron beam source is fitted on one side of the mounting board 61 constituting a semiconductor electron beam detector 60, divided into four regions A1 to A4. A signal in accordance with an incident volume of the electron beam is outputted from each region A1 to A4. A center of the mounting board 61 is detected by moving the semiconductor electron beam detector 60 so that the output signals from the regions A1 to A4 become all equal to position the electron beam path 75 and the electron beam EB on the same axis. COPYRIGHT: (C)2004,JPO
|
