| 摘要 |
PROBLEM TO BE SOLVED: To achieve high precision exposure by enhancing the positional controllability of a stage. SOLUTION: A stage WST is driven by a linear motor 36X, in the direction of an X axis, along a guide member 42. At this time, compressed air is jetted against facing guide faces 62a and 62b from air bearings 52A and 52B provided in a stage, and a given clearance is made between the guide face and the stage by the static pressure of the pressurized air. Moreover, when the guide member is driven in a Y-axis direction by a Y-axis linear motor, the stage shifts integrally in the Y-axis direction with the guide member 42 via the static pressure of the air within the clearance. At this point, although the pressure by the static pressure of the air acts on the guide face, but it can secure parallelism between the guide face and the bearing face to a sufficient level, since slits 70 for suppressing the tilting to the bearing face of the guide face are made severally at the guide part 43A and 43B of the guide member. COPYRIGHT: (C)2004,JPO |
