| 摘要 |
PROBLEM TO BE SOLVED: To provide a CCD type solid state imaging apparatus provided with an output amp having a small incidental capacitance. SOLUTION: The CCD type solid state imaging apparatus comprises a plurality of photoelectric conversion elements formed in a matrix manner on a semiconductor substrate, a plurality of VCCDs containing a vertical channel region formed along each column of the photoelectric conversion elements and an electric charge transfer electrode formed above the region, an HCCD containing a lateral channel region coupled to one end of the plurality of VCCDs and the electric charge transfer electrode formed above the region, a floating diffusion coupled to the one end of the HCCD and formed on the semiconductor substrate, and an input gate electrode of the output amp which has a part extending to at least the vicinity of the floating diffusion and is thinner than the electric charge transfer electrode. COPYRIGHT: (C)2004,JPO
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