发明名称 |
Packaged radiation sensitive coated workpiece process for making and method of storing same |
摘要 |
The present invention includes a packaged coated workpiece. The packaged coated workpiece has: (1) a workpiece coated with a resist film sensitive to optical radiation, particulates or chemical contaminants; (2) an inner barrier sealed to enclose the coated workpiece and optionally a first getter agent, to produce a sealed first enclosure; and (3) an outer barrier sealed to enclose the sealed first enclosure and optionally a second getter agent, provided that the packaged coated workpiece has at least one getter agent, to produce a packaged coated workpiece suitable for storage for a period of at least one week without substantial loss of sensitivity, resolution or performance. The present invention also includes a process for preparing a packaged coated workpiece and a method of increasing the storage time of a coated workpiece to at least one week without substantial loss of sensitivity, resolution or performance.
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申请公布号 |
US2004045866(A1) |
申请公布日期 |
2004.03.11 |
申请号 |
US20020295595 |
申请日期 |
2002.11.15 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ANGELOPOULOS MARIE;HUANG WU-SONG;KWONG RANEE WAI-LING;MEDEIROS DAVID ROBERT;MOREAU WAYNE MARTIN;PETRILLO KAREN ELIZABETH;WENDT HERMAN RUSSELL;MAGG CHRISTOPHER KARL |
分类号 |
G03F7/039;G03F7/00;H01L21/027;(IPC1-7):B65D85/30 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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