发明名称 Anti-electron reflector arrangement
摘要 An anti-electron reflector is constructed to include a substrate, an electron resistant layer formed on a top side of the substrate, and an anti-electron reflective layer provided in between the substrate and the electron resistant layer for enabling an electron beam to pass to the inside of the substrate in an incident direction and minimizing the amount of electrons of the electron beam that return to the electron resistant layer after reflection by the substrate.
申请公布号 US2004046132(A1) 申请公布日期 2004.03.11
申请号 US20020237899 申请日期 2002.09.10
申请人 LIN HSI-HSIANG;CHEN CHIEN-YANG 发明人 LIN HSI-HSIANG;CHEN CHIEN-YANG
分类号 H01J37/08;H01J37/317;(IPC1-7):H01J37/317 主分类号 H01J37/08
代理机构 代理人
主权项
地址