| 摘要 |
PURPOSE: An apparatus for evaluating material property of a PDP and a measuring method using the same are provided to enhance reliability of secondary battery emission coefficient of a protection layer at a plasma atmosphere. CONSTITUTION: An apparatus(20) for evaluating material property of a PDP comprises a vacuum chamber(21), a plasma electrode(22) mounted on a top inside of the vacuum chamber and having an insulation layer, a plasma power source(24) for supplying power to the plasma electrode, a substrate(29) mounted on a bottom inside of the vacuum chamber and having materials(27) for measurement and materials(28) for reference, a power supply(32) for supplying power to the materials for measurement and reference, a plasma discharge gas unit(35) connected to the vacuum chamber and injecting discharge gas into the vacuum chamber to generate plasma discharge, and an exhaust unit connected to the vacuum chamber to vacuum exhaust the inside of the vacuum chamber. |
