Process and apparatus for forming zinc oxide film, and process and apparatus for producing photovoltaic device

摘要

Disclosed are an electrodeposition process comprising the steps of transporting a substrate (2006) in an electrodeposition bath, and forming a film on the substrate, which process further comprises the step of removing particles from the surface of the substrate; and an electrodeposition apparatus comprising an electrodeposition tank (2066) for holding therein an electrodeposition bath, a mechanism for transporting a continuous-length substrate while holding the substrate thereon, and an opposing electrode (2026 to 2049), which apparatus further comprises a mechanism for removing particles from the surface of the continuous-length substrate. These can provide a process and an apparatus by and in which dust in the bath or any particles due to film-peeling from electrodes can be prevented from causing difficulties such as impact marks in a film-deposited substrate during its transport, to form a good-quality electrodeposited film.