Sputter ion source

摘要

A source for sputter ions includes an ionizer (2), a cathode (3), a sputter insert (4), an activation electrode (5), a shielding cap (6) and a cathode insulator (7) in a vacuum-sealed casing. A shielding electrode (1) fits with a hollow cylindrical shape around a sputter cathode consisting of the cathode, the sputter insert and the shielding cap.