| 发明名称 |
Differential pumping system and exposure apparatus |
| 摘要 |
A differential pumping system (1) includes a first chamber (100) for storing a light source (106) that emits light, a second chamber (200) that receives light from the first chamber (100), a vacuum pump (152), provided between the first and second chambers, and a hollow shaft (300) through which the light passes, and exhausts the hollow shaft. <IMAGE>
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| 申请公布号 |
EP1396760(A2) |
申请公布日期 |
2004.03.10 |
| 申请号 |
EP20030255468 |
申请日期 |
2003.09.02 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
HASEGAWA, TAKAYUKI;MIYAKE, AKIRA;OGUSHI, NOBUAKI |
| 分类号 |
G21K5/00;F04D19/04;F04D29/053;G03F7/20;G03F7/22;G21K5/02;H01L21/027;(IPC1-7):G03F7/20 |
主分类号 |
G21K5/00 |
| 代理机构 |
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代理人 |
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