MgO PROTECTION FILM DEPOSITION SYSTEM OF PDP USING INDUCTION COUPLING PLASMA AND METHOD THEREOF

摘要

PURPOSE: A MgO protection film deposition system and a method thereof are provided to reduce the unit cost of products and achieve a large deposition of MgO. CONSTITUTION: A MgO protection film deposition system of a PDP using induction coupling plasma comprises a chamber(30) receiving an inert gas and oxygen, a boat(34) installed into the chamber in order to evaporate MgO, and an induction coupling plasma generating unit. The induction coupling plasma generating unit converts the inert gas, oxygen and Mg into plasma status and forms MgO protection film on one surface of a substrate(38) installed in the chamber.