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发明名称
Verfahren zum thermischen Abscheiden von kristallinem Silizium
摘要
申请公布号
CH487074(A)
申请公布日期
1970.03.15
申请号
CH19640015603
申请日期
1964.12.03
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
DR. SIRTL,ERHARD,DIPL.-CHEM.
分类号
C01B33/035;C23C16/24;C30B13/00;C30B25/00;C30B25/02;(IPC1-7):C01B33/02;B01J17/32;B01J17/40
主分类号
C01B33/035
代理机构
代理人
主权项
地址
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