PICK ARM ASSEMBLY OF ION IMPLANTATION EQUIPMENT

摘要

PURPOSE: A pick arm assembly of ion implantation equipment is provided to prevent previously the damage of wafer by reporting a mis-aligning state of the pick arm assembly without delay. CONSTITUTION: A pick arm assembly of ion implantation equipment includes a body, an arm part(110), a wafer receiving part(150), and a sensor part(400). The arm part(110) is connected to the body. The wafer receiving part(150) is connected to the arm part in order to receive a wafer. The sensor part(400) senses each aligning state of the arm part and the wafer receiving part. The sensor part(400) includes a magnetic sensor(410) and a metal portion(450). The magnetic sensor(410) is installed on a predetermined side of the arm part opposite to the wafer receiving part(150). The metal portion(450) is installed on a predetermined side of the wafer receiving part opposite to the arm part.