| 摘要 |
PURPOSE: An apparatus and a method for inspecting surfaces of objects using a line type image sensor are provided to precisely detect surface defects of objects by comparing inspection data of objects without surface defects and objects with surface defects. CONSTITUTION: A surface inspecting apparatus includes a light source(61) which irradiates light onto a surface of an object(50) to be inspected. Two line type image sensors(62,64) are provided to detect reflected light from the surface of the object(50) being inspected. The line type image sensors(62,64) detect the reflected light in different angular positions. An image processing section(65) is provided to get images by processing the reflected light obtained by the line type image sensors(62,64). A comparing/determining section(66) determines surface defects by comparing brightness of images from the image processing section(65).
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